Based on Tiger Optics’ new global platform, the T-I Max series monitors for Airborne Molecular Contaminants (AMCs) deliver unprecedented performance, including:
Sensitive, absolute measurement technique, using Cavity Ring-Down Spectroscopy (CRDS)
Dramatically improved speed of response
Parts-per-trillion detection limits
Drift-free, with calibration traceable to the world’s leading reference labs
Lowest Cost of Ownership and maintenance
Next-Generation Trace Gas Analyzers for Detection & Continuous Monitoring of Airborne Molecular Contaminants in Semiconductor Cleanrooms
T-I Max HF, Range: 0 − 1 ppm, LDL (3σ@100s): 20 ppt, Speed of Response (T10/90+T90/10): < 3 minutes @ 20 ppb
T-I Max HCl, Range: 0 − 4 ppm, LDL (3σ@100s): 100 ppt, Speed of Response (T10/90+T90/10): < 30 seconds @ 20 ppb
T-I Max NH3, Range: 0 − 40 ppm, LDL (3σ@100s): 300 ppt, Speed of Response (T10/90+T90/10): < 3 minutes @ 20 ppb